Electrostatic Linear Microactuator with Vibrating Motion
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Transactions of the Japan Society of Mechanical Engineers Series C
سال: 1997
ISSN: 1884-8354,0387-5024
DOI: 10.1299/kikaic.63.2017